Laboratories
21 professors form IMTEK's backbone. Organised autonomously, they cover the whole variety of MEMS Technology.
- Buse, Karsten | Optical Systems
- Dehé, Alfons | Georg H. Endress Chair for Smart Systems Integration
- Diehl, Moritz | Systems Control and Optimization
- Eberl, Christoph | Micro and Materials Mechanics
- Egert, Ulrich | Biomicrotechnology
- Manoli, Yiannos | Fritz Huettinger Chair of Microelectronics
- Pastewka, Lars | Simulation
- Paul, Oliver | Microsystem Materials
- Reindl, Leonhard | Electrical Instrumentation
- Rapp, Bastian | Process Technology
- Rohrbach, Alexander | Bio- and Nanophotonics
- Rühe, Jürgen | Chemistry and Physics of Interfaces
- Stieglitz, Thomas | Biomedical Microtechnology
- Urban, Gerald | Sensors
- Wallrabe, Ulrike | Microactuators
- Wilde, Jürgen | Assembly and Packaging Technology
- Wöllenstein, Jürgen | Thin-film Gas Sensors
- Woias, Peter | Design of Microsystems
- Zacharias, Margit | Nanotechnology
- Zappe, Hans | Gisela and Erwin Sick Chair of Micro-optics
- Zengerle, Roland | MEMS Applications
Adjunct Professor (Außerplanmäßiger Professor)
- apl. Prof. Dr. Hanemann, Thomas | Materials Processing
- apl. Prof. Dr. von Stetten, Felix | Lab-on-a-Chip
Junior Research Groups
- Asplund, Maria | ElectroActive Coatings group | BrainLinks-BrainTools Research Group Leader
- Lienkamp, Karen | Bioactive Polymer Synthesis and Surface Engineering | Emmy Noether Research Group Lead
- Osorio, Anayancy│Bioinspired Materials for Biomedical Engineering│Margarete von Wrangell Junior Research Group Leader
- Vierrath, Severin | Electrochemical Energy Systems | Junior Research Group Lead
Former Groups
- Kuhl, Matthias | Modeling and Design of Integrated Interface Circuits
- Meier, Matthias | Microfluidic and Biological Engineering | Emmy Noether Research Group Leader
- Schwarz, Ulrich T. | Optoelectronics